Luminous Chemical Vapor Deposition and Interface Engineering by Hirotsugu Yasuda

By Hirotsugu Yasuda

Yasuda (chemical engineering, collage of Missouri-Columbia) presents in-depth assurance of the applied sciences and numerous techniques in luminous chemical vapor deposition (LCVD) and showcases the improvement and use of LCVD systems in commercial scale purposes. The booklet presents wide insurance of the relationships serious about the interface among gas/solid, liquid/solid, and solid/solid that are used in low-pressure plasma interface engineering, with awareness concerned with plasma polymerization. assurance progresses from basics of LCVD via operation of LCVD and LCVT, surfaces and interfaces, and interface engineering.

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Plasma polymer from the mixture of (1 sccm TMS þ 4 sccm O2) is highly hydrophilic (water contact angle less than 5 degrees) and contains no dangling bond [5,6]. 6. 7 The glow of a mixed flow of 1 sccm TMS and 4 sccm O2; both the cathode glow and the negative glow appear at the onset of glow discharge; top: 5 s after, bottom: 60 s after the onset of glow discharge. , about 100 kHz. Therefore, the polymer deposition in DC discharge as well as in an AC discharge is a mixture of DC cathodic polymerization that occurs in the cathode glow (DG) and negative glow polymerization that occurs in the negative glow (IG).

Simple molecular gases, such as N2, O2, and CO2, do not create the dissociation glow; the addition of simple molecular gas to an organic molecule changes the basic characteristics of glow completely. 13 Comparison of glows for TMS and (TMS þ O2) at the comparable level of energy input, 40 kHz discharge, without mangnetron. 30 Yasuda adding oxygen to TMS in the ordinary parallel electrodes reactor with 40 kHz power source. The intensity as well as the expansion of glow volume is completely different depending on the absence or presence of oxygen in the gas.

When dealing with the formation of reactive species and other operation and processing aspects, LCVD is preferentially used. REFERENCES 1. 2. 3. 4. 5. 6. 7. 8. 9. 10. 11. 12. Yasuda, H. Plasma polymerization and plasma modification of polymer surfaces. ; Blackie: London, 1995; Vol. 2, 161–196. ; Shen, M. J. Polym. , Polym. Lett. Ed. 1978, 16, 309. T. ACS Symp. Ser. 1979, 108, 253. I. Polym. Bull. 1980, 3, 437. ; Takase, M. Kobunshi Ronbunshu 1981, 38, 629. ; Shen, M. Macromolecules 1981, 14, 118.

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